Ion Gauge Tube
| @ @Specification@ |  |
||||
| Pressure Range | 1~10-3 ` 2~10-10 | Torr | |||
| X-Ray Limit | 2~10-10 | Torr | |||
| Collector | O volts DC | To Ground | |||
| Grid Potential | +180 Volts DC | To Ground | |||
| Filament | +30 Volts DC | To Ground | |||
@ @List of Conformity Products@
SEMIVAC P/N |
VARIAN |
Fil-tech |
G-P |
Type Diameter Filament |
Adaptation Device |
|---|---|---|---|---|---|
| GFBA-502 | 0572-K7360-301 | G100PT | 274-015 | 1h W@ Glass | ion implantation (Varian, AMAT) |
| GFBA-503 | 0571-K2471-301 | 1h Ir@ Glass | |||
| GFBA-504 | 0572-K7360-302 | 274-016 | 1h W@Kover | MRC | |
| GFBA-504F | 274-018 | 2-3/4 Flanget | MRC (4053050/Eclipse) | ||
| GFBA-505S | 0563-K2466-302 | G100KC | 1h Ir Kover+Shield | ||
| GFBA-506 | 0572-K7360-303 | G75PT | 274-012 | 3/4hW@ Glass | Eaton-Nova (3300002) |
| GFBA-551 | 0564-K2500-302 | 1h Ir Kover+Shield | Varian sputtering | ||
| GFBA-709 | G71PT | ||||
| For print ion.pdf (34KB) |
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